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Image Series Name Parts Number Size(mm3) Spec-sheet
Epi Wafer AlN 2" (50.8㎜)
Thickness (Included substrate)
430㎛±15㎛
Thickness (Included substrate)
430㎛±15㎛
Structure
AlN / Sapphire substrate
 
Characteristics (at 25℃)
Parameter Typ. Test Conditions
Crack Free AlN Surface
Area
Diameter >44mm  
Thickness Thickness <3㎛
XRD (002) <300 arcsec Panalytical
HRXRD
(102) <600 arcsec
RMS 2 ㎛ * 2 ㎛ 1 nm  
 
Technical inquiry : jinjoo@geni-uv.com / Jin, Joo (Director of Research)